Aligned Ion Implantation Using Scanning Probes. Towards Precise Single Ion Placement for a Solid State Quantum Computer

Aligned Ion Implantation Using Scanning Probes. Towards Precise Single Ion Placement for a Solid State Quantum Computer
Год
 
Страниц
 
108
ISBN
 
9783639049213
Издатель
 
Книга по требованию

Описание:

A new technique for precise ion implantation has been developed using a scanning probe that has been equipped with a small aperture and incorporated into an ion beamline. Ions are passed through the aperture and implanted into a sample. By using a...

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