Amorphous Silicon Carbide for MEMS Applications. Process Development and Techniques of Integration with Stereolithographic Structures

книги
Amorphous Silicon Carbide for MEMS Applications. Process Development and Techniques of Integration with Stereolithographic Structures
Год
 
Страниц
 
180
ISBN
 
9783639305272
Издатель
 
Книга по требованию

Описание:

This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its...

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