Optical and Radiometric Properties of the PtSi/p Si Composites.
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Описание:
The study involves an attempt to increase the internal quantum efficiencies of PtSi/Si(100) by a novel micro-structural composite arrangement of the platinium silicide particles (50– 190 nm in size) dispersed uniformly within a p-type silicon matrix. These dispersed PtSi particles form Schottky barriers of a large total area within a relatively small volume element. These matrix structures have the potential of being employed as infrared detectors in the 3 – 5 um range, operating at temperatures well above that of liquid nitrogen. Since these detectors are grown on a silicon wafer base, it augurs well for integrating these detectors into microelectronic devices. Annealing times ranged from three to ninety minutes, at a variety of temperatures ranging between 500 and800 oC, in order to promote the growth of the PtSi phase structure with a variety of grain sizes. During the processing of the sample into an IR sensor device, the samples were characterized by optical as well as...Похожие книги
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